Surface structure of (111)A HgCdTe

被引:11
|
作者
Benson, J. D.
Varesi, J. B.
Stoltz, A. J.
Smith, E. P. G.
Johnson, S. M.
Jaime-Vasquez, M.
Markunas, J. K.
Almeida, L. A.
Molstad, J. C.
机构
[1] U.S. Army RDECOM,
[2] CERDEC Night Vision and Electronic Sensors Directorate,undefined
[3] Raytheon Vision Systems,undefined
[4] U.S. Army Research Laboratory,undefined
关键词
HgCdTe; liquid-phase epitaxy (LPE); atomic force microscopy (AFM); macro-steps; cross-hatch;
D O I
10.1007/s11664-006-0280-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The surface of (111)A HgCdTe has been studied by reflection high-energy electron diffraction and atomic force microscopy (AFM). The as-grown liquid-phase epitaxy (LPE) surface has bilayer (3.7 +/- 0.2 angstrom) step/terrace structures, macro-steps, and cross-hatch patterns. Macro-steps occur about the [112] and are from 10-40 angstrom in height. AFM and x-ray measurements indicate the as-grown epilayer is approximate to 0.2 degrees off-cut (random polar angle) from the (111). < 110 > cross-hatch lines consistent with bilayer (step height = 3.9 +/- 0.2 angstrom) {111} slip dislocation are observed. The native oxide/carbon layer for the as-grown LPE (111)A HgCdTe is 8 angstrom. The experimental results suggest that the as-grown LPE surface approximates an equilibrium vicinal crystal structure. The 0.1% Br:ethylene glycol wet chemically etched surfaces retained the macro-step structure, but numerous small protrusions (10-100 angstrom height, approximate to 300 angstrom diameter) developed. The plasma-etched (111)angstrom HgCdTe surface is crystalline, but exhibits surface disorder and is roughened.
引用
收藏
页码:1434 / 1442
页数:9
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