Low-Loss Slot Waveguides with Silicon (111) Surfaces Realized Using Anisotropic Wet Etching

被引：17

作者：

Debnath, Kapil ^{[1
]}

Khokhar, Ali Z. ^{[2
]}

Boden, Stuart A. ^{[1
]}

Arimoto, Hideo ^{[1
]}

Oo, Swe Zin ^{[1
]}

Chong, Harold M. H. ^{[1
]}

Reed, Graham T. ^{[2
]}

Saito, Shinichi ^{[1
]}

机构：

[1] Univ Southampton, Fac Phys Sci & Engn, Southampton, Hants, England

[2] Univ Southampton, Optoelect Res Ctr, Southampton, Hants, England

来源：

FRONTIERS IN MATERIALS | 2016年 / 3卷

基金：

英国工程与自然科学研究理事会;

关键词：

silicon photonics; waveguide; anisotropic wet etching; slot waveguide; integrated photonics; STRIP; FABRICATION;

D O I：

10.3389/fmats.2016.00051

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrate low-loss slot waveguides on silicon-on-insulator platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A tetramethylammonium hydroxide-based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique, propagation loss as low as 3.7 dB/cm was realized in silicon slot waveguide for wavelengths near 1550 nm. We also realized low propagation loss of 1 dB/cm for silicon strip waveguides.

引用

页数：5

共 20 条

[1] Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition
Alasaarela, T.
Korn, D.
Alloatti, L.
Saynatjoki, A.
Tervonen, A.
Palmer, R.
Leuthold, J.
Freude, W.
Honkanen, S.
[J]. OPTICS EXPRESS, 2011, 19 (12): : 11529 - 11538
[2] Guiding and confining light in void nanostructure
Almeida, VR
Xu, QF
Barrios, CA
Lipson, M
[J]. OPTICS LETTERS, 2004, 29 (11) : 1209 - 1211
[3] High-Q optical resonators in silicon-on-insulator-based slot waveguides
Baehr-Jones, T
Hochberg, M
Walker, C
Scherer, A
[J]. APPLIED PHYSICS LETTERS, 2005, 86 (08) : 1 - 3
[4] Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V
Baehr-Jones, Tom
Penkov, Boyan
Huang, Jingqing
Sullivan, Phil
Davies, Joshua
Takayesu, Jocelyn
Luo, Jingdong
Kim, Tae-Dong
Dalton, Larry
Jen, Alex
Hochberg, Michael
Scherer, Axel
[J]. APPLIED PHYSICS LETTERS, 2008, 92 (16)
[5] Slot-waveguide biochemical sensor
Barrios, Carlos A.
Gylfason, Kristinn B.
Sanchez, Benito
Griol, Amadeu
Sohlstroem, H.
Holgado, M.
Casquel, R.
[J]. OPTICS LETTERS, 2007, 32 (21) : 3080 - 3082
[6] A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips
Carlborg, C. F.
Gylfason, K. B.
Kazmierczak, A.
Dortu, F.
Banuls Polo, M. J.
Maquieira Catala, A.
Kresbach, G. M.
Sohlstrom, H.
Moh, T.
Vivien, L.
Popplewell, J.
Ronan, G.
Barrios, C. A.
Stemme, G.
van der Wijngaart, W.
[J]. LAB ON A CHIP, 2010, 10 (03) : 281 - 290
[7] Capacitor-embedded 0.54 pJ/bit silicon-slot photonic crystal waveguide modulator
Chen, Xiaonan
Chen, Yun-Sheng
Zhao, Yang
Jiang, Wei
Chen, Ray T.
[J]. OPTICS LETTERS, 2009, 34 (05) : 602 - 604
[8] Efficient perfectly vertical fiber-to-chip grating coupler for silicon horizontal multiple slot waveguides
Covey, John
Chen, Ray T.
[J]. OPTICS EXPRESS, 2013, 21 (09): : 10886 - 10896
[9] Low-Loss Silicon Waveguides and Grating Couplers Fabricated Using Anisotropic Wet Etching Technique
Debnath, Kapil
Arimoto, Hideo
Husain, Muhammad K.
Prasmusinto, Alyssa
Al-Attili, Abdelrahman
Petra, Rafidah
Chong, Harold M. H.
Reed, Graham T.
Saito, Shinichi
[J]. FRONTIERS IN MATERIALS, 2016, 3
[10] Low-loss strip-loaded slot waveguides in Silicon-on-Insulator
Ding, Ran
Baehr-Jones, Tom
Kim, Woo-Joong
Xiong, Xugang
Bojko, Richard
Fedeli, Jean-Marc
Fournier, Maryse
Hochberg, Michael
[J]. OPTICS EXPRESS, 2010, 18 (24): : 25061 - 25067

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