Physics-based mathematical conditioning of the MOSFET surface potential equation

被引:30
作者
Wu, WM [1 ]
Chen, TL
Gildenblat, G
McAndrew, CC
机构
[1] Penn State Univ, Dept Elect Engn, University Pk, PA 16802 USA
[2] Motorola Inc, Tempe, AZ 85284 USA
关键词
Imref splitting; metal-oxide-semiconductor field-effect transistors (MOSFETs); surface potential;
D O I
10.1109/TED.2004.829902
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The traditional form of the implicit equation for the surface potential (phi(s)) in metal-oxide-semiconductor field-effect transistors (MOSFETs) works well except near the flatband point phi(s) = 0 where it is both unphysical and ill-conditioned mathematically. This represents a significant difficulty for recent surface potential-based models, which require phi(s) evaluation from the accumulation to the strong inversion region. Detailed physical analysis combined with two-dimensional numerical simulations is used to develop a physics-based well-conditioned version of the surface potential equation.
引用
收藏
页码:1196 / 1200
页数:5
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