The composition analysis of YBa2Cu3O7-delta or PrBa2Cu3O7-delta thin films and (YBa2Cu3O7-delta/PrBa2Cu3O7-delta)(n) heterostructures prepared by CVD

被引：3
|
作者：
Dubourdieu, C
Didier, N
Thomas, O
Senateur, JP
Valignat, N
Rebane, Y
Kouznetsova, T
Gaskov, A
Hartmann, J
Stritzker, B
机构：
[1] MOSCOW MV LOMONOSOV STATE UNIV,DEPT CHEM,MOSCOW 119899,RUSSIA
[2] INST NATL POLYTECH GRENOBLE,LMGP,CNRS,ENS PHYS GRENOBLE,F-38402 ST MARTIN DHER,FRANCE
[3] LTPCM,F-38402 ST MARTIN DHER,FRANCE
[4] UNIV AUGSBURG,INST PHYS,LEHRSTUHL EXPT PHYS 4,D-8900 AUGSBURG,GERMANY
来源：
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1997年 / 357卷 / 08期
关键词：
Thin Film; Chemical Vapor Deposition; Vapor Deposition; Chemical Vapor; Reference Sample;
D O I：
10.1007/s002160050305
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Some YBa2Cu3O7-delta films and heterostructures prepared by Chemical Vapor Deposition (CVD) were analyzed in our laboratories by EPMA-EDX or WDX, RES, SNMS and AES. It was found that in some cases the results of composition analysis can significantly deviate from each other. At least two main reasons for these deviations exist: the different lateral resolution and the application of different reference samples for the calibration.
引用
收藏
页码：1061 / 1065
页数：5
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