A 2D ELECTRET-BASED RESONANT MICRO ENERGY HARVESTER

被引：34

作者：

Bartsch, U. ^{[1
]}

Gaspar, J. ^{[1
]}

Paul, O. ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Freiburg, Germany

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

D O I：

10.1109/MEMSYS.2009.4805565

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the integration of several technologies to realize, to our knowledge, the first two-dimensional (2D) electrostatic resonant micro energy generator. In the generator, ambient vibrations lead to the oscillation of the movable parts of two micromachined and assembled substrates. Charged Cytop-based electret structures patterned on these parts and arranged in a variable capacitor configuration translate the oscillations into a displacement current whose energy is harvested. The device results from (i) the design, fabrication and characterization of low-frequency 2D resonators to extract energy from ambient vibrations, (ii) processing, charging and long-term characterization of Cytop as an electret material and (iii) development of a packaging technology based on adhesive bonding using Cytop as well.

引用

页码：1043 / 1046

页数：4

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