Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

被引：41

作者：

Burnett, JH ^{[1
]}

Kaplan, SG ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA

来源：

JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS | 2004年 / 3卷 / 01期

关键词：

index of refraction; refractive index; thermo-optic coefficient; 193-nm immersion lithography;

D O I：

10.1117/1.1632501

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present accurate measurements of several important optical constants of high-purity water for wavelengths near 193.39 nm at 21.50degreesC: the absolute refractive index n = 1.43662(2), the dispersion dn/dlambda = -2.109(17) x 10(-3) nm(-1), and the thermo-optic coefficient dn/dT = -1.00(4) x 10(-4) (degreesC)(-1). We determine these values by two independent approaches, the minimum deviation prism method and an interferometric technique, and find that they give mutually consistent results. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

引用

页码：68 / 72

页数：5

共 12 条

[1] SURF III - an improved storage ring for radiometry [J].

Arp, U ;

Friedman, R ;

Furst, ML ;

Makar, S ;

Shaw, PS .

METROLOGIA, 2000, 37 (05) :357-360

[2] AN UPDATED EDLEN EQUATION FOR THE REFRACTIVE-INDEX OF AIR [J].

BIRCH, KP ;

DOWNS, MJ .

METROLOGIA, 1993, 30 (03) :155-162

[3]

Born M., 1999, PRINCIPLES OPTICS, P190

[4] Absolute refractive indices and thermal coefficients of CaF2, SrF2, BaF2, and LiF near 157 nm [J].

Burnett, JH ;

Gupta, R ;

Griesmann, U .

APPLIED OPTICS, 2002, 41 (13) :2508-2513

[5] HIGH-CURRENT HOLLOW-CATHODE AS A RADIOMETRIC TRANSFER STANDARD SOURCE FOR THE EXTREME VACUUM ULTRAVIOLET [J].

DANZMANN, K ;

GUNTHER, M ;

FISCHER, J ;

KOCK, M ;

KUHNE, M .

APPLIED OPTICS, 1988, 27 (23) :4947-4951

[6] INFRARED REFRACTIVE-INDEX OF SILICON [J].

EDWARDS, DF ;

OCHOA, E .

APPLIED OPTICS, 1980, 19 (24) :4130-4131

[7] The NIST FT700 Vacuum Ultraviolet Fourier Transform Spectrometer: applications in ultraviolet spectrometry and radiometry [J].

Griesmann, U ;

Kling, R ;

Burnett, JH ;

Bratasz, L .

ULTRAVIOLET ATMOSPHERIC AND SPACE REMOTE SENSING: METHODS AND INSTRUMENTATION II, 1999, 3818 :180-188

[8] Absolute refractive indices and thermal coefficients of fused silica and calcium fluoride near 193 nm [J].

Gupta, R ;

Burnett, JH ;

Griesmann, U ;

Walhout, M .

APPLIED OPTICS, 1998, 37 (25) :5964-5968

[9] Revised formulation for the refractive index of water and steam as a function of wavelength, temperature and density [J].

Harvey, AH ;

Gallagher, JS ;

Sengers, JMHL .

JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1998, 27 (04) :761-774

[10] REFRACTOMETRY BY MINIMUM DEVIATION - ACCURACY ANALYSIS [J].

TENTORI, D ;

LERMA, JR .

OPTICAL ENGINEERING, 1990, 29 (02) :160-168

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