Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

被引：23

作者：

Liu, Ting-Wei ^{[1
]}

Lin, Yu-Ching ^{[2
]}

Tsai, Yao-Chuan ^{[2
]}

Ono, Takahito ^{[3
]}

Tanaka, Shuji ^{[3
]}

Wu, Tsung-Tsong ^{[1
]}

机构：

[1] Natl Taiwan Univ, Inst Appl Mech, Taipei, Taiwan

[2] Tohoku Univ, WPI AIMR, Sendai, Miyagi 980, Japan

[3] Tohoku Univ, Dept Mech Engn, Sendai, Miyagi 980, Japan

来源：

APPLIED PHYSICS LETTERS | 2014年 / 104卷 / 18期

关键词：

FINGER INTERDIGITAL TRANSDUCERS; ACOUSTIC-WAVES; ELASTIC PROPERTIES; CRYSTALS; SURFACE; PROPAGATION;

D O I：

10.1063/1.4875981

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices. (C) 2014 AIP Publishing LLC.

引用

页数：4

共 36 条

[1] Experimental observation of locally-resonant and Bragg band gaps for surface guided waves in a phononic crystal of pillars [J].