High Performance pH Sensor by Using Silicon Nanowire Array

被引：0

作者：

Yang, Xun ^{[1
]}

Chen, Shixing

Wang, Yi

Wang, Yuelin

Li, Tie

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China

来源：

2017 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP 2017) | 2017年

基金：

中国国家自然科学基金;

关键词：

Silicon nanowire; array; pH sensor; NANOSENSORS; FABRICATION;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a low-cost and high-precision pH sensor using silicon nanowire (SiNW) array. With the help of traditional microfabrication technology, low-cost as well as highly controllable SiNW array was fabricated. After functionalized with APTES solution, SiNW array shows rapid and reliable response to pH value. With excellent linearity and repeatability, accuracy of the sensor can be achieved at +/- 0.1pH. Further unknown pH value solutions are used to confirm the accuracy of the meter.

引用

页数：4

共 10 条

[1] Silicon nanowire piezoresistance: Impact of surface crystallographic orientation [J].

Barwicz, Tymon ;

Klein, Levente ;

Koester, Steven J. ;

Hamann, Hendrik .

APPLIED PHYSICS LETTERS, 2010, 97 (02)

[2] Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species [J].

Cui, Y ;

Wei, QQ ;

Park, HK ;

Lieber, CM .

SCIENCE, 2001, 293 (5533) :1289-1292

[3] Silicon-Nanowire-Based CMOS-Compatible Field-Effect Transistor Nanosensors for Ultrasensitive Electrical Detection of Nucleic Acids [J].

Gao, Anran ;

Lu, Na ;

Dai, Pengfei ;

Li, Tie ;

Pei, Hao ;

Gao, Xiuli ;

Gong, Yibin ;

Wang, Yuelin ;

Fan, Chunhai .

NANO LETTERS, 2011, 11 (09) :3974-3978

[4] Giant piezoresistance effect in silicon nanowires [J].

He, Rongrui ;

Yang, Peidong .

NATURE NANOTECHNOLOGY, 2006, 1 (01) :42-46

[5] Controlled fabrication of silicon nanowires by electron beam lithography and electrochemical size reduction [J].

Juhasz, R ;

Elfström, N ;

Linnros, J .

NANO LETTERS, 2005, 5 (02) :275-280

[6] Piezoresistance of top-down suspended Si nanowires [J].

Koumela, A. ;

Mercier, D. ;

Dupre, C. ;

Jourdan, G. ;

Marcoux, C. ;

Ollier, E. ;

Purcell, S. T. ;

Duraffourg, L. .

NANOTECHNOLOGY, 2011, 22 (39)

[7]

Lee K., 2008, SMALL, V4, P462

[8] Fabrication of suspended silicon nanowire arrays [J].

Lee, Kook-Nyung ;

Jung, Suk-Won ;

Shin, Kyu-Sik ;

Kim, Won-Hyo ;

Lee, Min-Ho ;

Seong, Woo-Kyeong .

SMALL, 2008, 4 (05) :642-648

[9] Top-Down Fabricated Silicon-Nanowire-Based Field-Effect Transistor Device on a (111) Silicon Wafer [J].

Yu, Xiao ;

Wang, Yuchen ;

Zhou, Hong ;

Liu, Yanxiang ;

Wang, Yi ;

Li, Tie ;

Wang, Yuelin .

SMALL, 2013, 9 (04) :525-530

[10] Volume-producible fabrication of a silicon nanowire via crystalline wet etching of (110) silicon [J].

Yun, Sung-Sik ;

Yoo, Sung-Keun ;

Yang, Sung ;

Lee, Jong-Hyun .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (09)

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