An Enhanced Force and Contact Position Sensor for Micro-Manipulations

In micro-manipulations, force sensing devices play ail important role in the control and the assembly of micro-objects. To protect these micro-objects from damage, we must have the ability to detect the value of the minute amount of interactive force (about a few mu N) upon contact between the tip and the object. To detect this micro-force, we need ail optimized design of force Sensor to increase the strain values at the positions we place sensing components. Stress concentration can effectively amplify the strain Values measured by the force sensors. This paper investigates the effect that the notches have oil increasing the strain values at the positions we attach the sensing elements. In addition, the optimal design with I flexible structure improves the sensitivity of the Sensor. An algorithm that call calculate both contact force and contact position on the Sensor tip is also mentioned. Besides, all optimal location of strain gauges will ensure the accuracy and stability of the measurement. Finally analysis and experiment are done to verify the proposed idea.