The influence of processing on properties and microstructure of Bi4-XLaXTi3O12 thin films

被引:0
|
作者
Qin, HX [1 ]
Bao, ZH
Zhu, JS
Jin, ZQ
Wang, YN
机构
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
[2] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China
关键词
Bi3.25La0.75Ti3O12 thin films; MOD; RF sputtering;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The Bi4-xLaxTi3O12 (x=0.75) thin films were prepared by RF magnetron sputtering and MOD techniques. The MOD-derived thin films show good ferroelectric properties and microstructure and the sputtered thin films have rougher surface and inhomogeneous microstructure.
引用
收藏
页码:723 / 728
页数:6
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