Refractive-index measurements using an integrated Mach-Zehnder interferometer

被引：36
|
作者：
Schubert, T
Haase, N
Kuck, H
GottfriedGottfried, R
机构：
[1] Fraunhofer-Institute, Microelectronic Circuits and Systems, IMS Dresden, 01109 Dresden
[2] Deutsches Elecktonen Synchrotron, Hamburg
[3] University of Duisburg, Fraunhofer-Inst. of Microlectron. C., Duisburg
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期
关键词：
integrated optical sensors; Mach-Zehnder interferometers; refractive index;
D O I：
10.1016/S0924-4247(97)01380-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a refractometer system with an integrated optical sensor is presented. The sensitive element is a single or multichannel Mach-Zehnder interferometer (MZI) fabricated on silicon using waveguides made from SiO2 and SiON. The refractometer allows for real-time monitoring of refractive indices of gases and liquids in an index range between 1 and 1.49 using the silicon MZI as a low-cost disposable part.
引用
收藏
页码：108 / 112
页数：5
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