Refractive-index measurements using an integrated Mach-Zehnder interferometer

被引：36

作者：

Schubert, T

Haase, N

Kuck, H

GottfriedGottfried, R

机构：

[1] Fraunhofer-Institute, Microelectronic Circuits and Systems, IMS Dresden, 01109 Dresden

[2] Deutsches Elecktonen Synchrotron, Hamburg

[3] University of Duisburg, Fraunhofer-Inst. of Microlectron. C., Duisburg

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期

关键词：

integrated optical sensors; Mach-Zehnder interferometers; refractive index;

D O I：

10.1016/S0924-4247(97)01380-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper a refractometer system with an integrated optical sensor is presented. The sensitive element is a single or multichannel Mach-Zehnder interferometer (MZI) fabricated on silicon using waveguides made from SiO2 and SiON. The refractometer allows for real-time monitoring of refractive indices of gases and liquids in an index range between 1 and 1.49 using the silicon MZI as a low-cost disposable part.

引用

页码：108 / 112

页数：5