Broadband antireflection film by glancing angle deposition

被引：13

作者：

Feng, Cao ^{[1
,2
,3
]}

Zhang, Weili ^{[1
,3
]}

Wang, Jianguo ^{[1
,3
]}

Ma, Haixia ^{[5
]}

Liu, Shijie ^{[1
,3
]}

Yi, Kui ^{[1
,3
]}

He, Hongbo ^{[1
,3
]}

Shao, Jianda ^{[1
,3
,4
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Thin Films Opt, Shanghai 201800, Peoples R China

[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China

[3] Chinese Acad Sci, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China

[4] Univ Chinese Acad Sci, Hangzhou Inst Adv Study, Hangzhou 310024, Peoples R China

[5] Nanjing Univ Aeronaut & Astronaut, Coll Sci, Nanjing 211106, Peoples R China

来源：

OPTICAL MATERIALS | 2021年 / 111卷

基金：

中国国家自然科学基金;

关键词：

Broadband anti-reflection film; Glancing angle deposition; Graded refractive index; INDEX OPTICAL FILTER; THIN-FILMS; FABRICATION; COATINGS;

D O I：

10.1016/j.optmat.2020.110720

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A broadband antireflection film was prepared with SiO2 by glancing angle deposition. The refractive index of the SiO2 film was tuned from 1.15 to 1.45 by adjusting the deposition angle. A novel broadband antireflection film was designed with the graded index film. The average reflectivity of antireflection film is less than 0.41% between 400 nm and 1800 nm wavelength range at 0.41% incident angle.

引用

页数：5

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