Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments

被引：32
作者：
Eifler, Matthias [1 ]
Hering, Julian [2 ,3 ]
Von Freymann, Georg [2 ,3 ,4 ]
Seewig, Jorg [1 ]
机构：
[1] Univ Kaiserslautern, Inst Measurement & Sensor Technol, Gottlieb Daimler Str 44, D-67663 Kaiserslautern, Germany
[2] Univ Kaiserslautern, Phys Dept, Erwin Schrodinger Str 56, D-67663 Kaiserslautern, Germany
[3] Univ Kaiserslautern, Res Ctr OPTIMAS, Erwin Schrodinger Str 56, D-67663 Kaiserslautern, Germany
[4] Fraunhofer Inst Ind Math ITWM, Fraunhofer Pl 1, D-67663 Kaiserslautern, Germany
来源：
OPTICS EXPRESS | 2018年 / 26卷 / 13期
关键词：
D O I：
10.1364/OE.26.016609
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码：16609 / 16623
页数：15
相关论文
共 31 条
  • [1] [Anonymous], P SPIE
  • [2] [Anonymous], 2016, MODELLBASIERTE ENTWI
  • [3] [Anonymous], 2012, ISO 25178-2
  • [4] BLUNT L., 2003, ADV TECHNIQUES ASSES
  • [5] The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement
    de Groot, Peter J.
    [J]. APPLIED SCIENCES-BASEL, 2017, 7 (01):
  • [6] Progress in the specification of optical instruments for the measurement of surface form and texture
    de Groot, Peter J.
    [J]. DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS III, 2014, 9110
  • [7] Deutsches Institut far Normung e. V, 2012, **DROPPED REF**
  • [8] Eifler M., SURF TOPO MET PROP
  • [9] Calibration of z-axis linearity for arbitrary optical topography measuring instruments
    Eifler, Matthias
    Seewig, Joerg
    Hering, Julian
    von Freymann, Georg
    [J]. OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION IX, 2015, 9525
  • [10] Calibration of the scales of areal surface topography measuring instruments: part 3. Resolution
    Giusca, Claudiu L.
    Leach, Richard K.
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2013, 24 (10)
1234