Fabrication of conductive silver micropatterns on an organic-inorganic hybrid film by laser direct writing

被引：34

作者：

Aminuzzaman, Mohammod ^{[1
]}

Watanabe, Akira ^{[1
]}

Miyashita, Tokuji ^{[1
]}

机构：

[1] Tohoku Univ, IMRAM, Aoba Ku, Sendai, Miyagi 9808577, Japan

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 20期

关键词：

Flexible electronics; Laser direct writing; Micropatterns; Resistivity; Nanometal ink; Hybrid polymer; Double-decker-shaped polysilsesquioxane (DDPSQ); SILSESQUIOXANE;

D O I：

10.1016/j.tsf.2009.04.043

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes fabrication of silver (Ag) micropatterns on a double-decker-shaped polysilsesquioxane (DDPSQ) hybrid film by laser-induced pyrolysis (LIP) of a film prepared from liquid-dispersed Ag nanoparticles. The line width of Ag micropatterns fabricated by LIP can be controlled flexibly by changing the numerical aperture (NA) value of an objective lens and the focusing point. By changing NA value of an objective lens, line widths of Ag micropatterns can be varied flexibly from 75 PM to 5 Pm. The Ag micropatterns show an excellent adherence to DDPSQ surface as evaluated by adhesive tape test. The resistivity of the Ag micropattern is determined to be 4.3 x 10(-6) Omega cm, which is comparable to that of bulk Ag (1.6 x 10(-6) Omega cm). (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：5935 / 5939

页数：5

共 25 条

[21] Direct drawing of submicrom wiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles [J].