Reliability Evaluation of Lithography Machines Using An Customer Satisfaction Index

被引：0
作者：
Zhang, Longlong [1 ]
Luo, Dashuang [1 ]
Li, Jing [1 ]
Huang, Hong-Zhong [1 ]
Liu, Yu [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Mech Elect & Ind Engn, Chengdu 611731, Sichuan, Peoples R China
来源：
PROCEEDINGS OF 2013 INTERNATIONAL CONFERENCE ON QUALITY, RELIABILITY, RISK, MAINTENANCE, AND SAFETY ENGINEERING (QR2MSE), VOLS I-IV | 2013年
关键词：
lithography machine; customer satisfaction index; reliability evaluation; expert knowledge; SERVICES;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Reliability evaluation can help designers to judge quality levels of products and improve their design. This paper evaluates reliability with considering customer satisfaction index (CSI). CSI is widely used in the field of economics to evaluate economic performance and feasibility. Using CSI and fuzzy synthetic assessment (FSA), we can get a satisfaction level about lithography machine. Five main factors were taken into account while building this model to evaluate lithography machine. Expert knowledge is considered to get values of these factors.
引用
收藏
页码：213 / 216
页数：4
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