Catalyst combustors with B-Doped SiGe/Au thermopile for micro-power-generation

被引：8
|
作者：
Nishibori, Maiko [1 ]
Shin, Woosuck [1 ]
Tajima, Kazuki [1 ]
Houlet, Lionel F. [1 ]
Izu, Noriya [1 ]
Matsubara, Ichiro [1 ]
Murayama, Norimitsu [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, AIST, Nagoya, Aichi 4638560, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2006年 / 45卷 / 42-45期
关键词：
thermoelectric; micro-power-generation; thermopile; SiGe; catalyst combustor;
D O I：
10.1143/JJAP.45.L1130
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thick-film catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 mu W using the micro-TE-generator with a fuel gas flow of 3 vol. % H-2 in air, 1000 ccm, at RT.
引用
收藏
页码：L1130 / L1132
页数：3
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