Growth of isolated domains induced by focused ion beam irradiation in congruent lithium niobate

被引：8

作者：

Chezganov, D. S. ^{[1
,2
]}

Vlasov, E. O. ^{[1
]}

Gimadeeva, L. V. ^{[1
]}

Alikin, D. O. ^{[1
]}

Chuvakova, M. A. ^{[1
]}

Vaskina, E. M. ^{[1
]}

Shur, V. Ya. ^{[1
,2
]}

机构：

[1] Ural Fed Univ, Sch Nat Sci & Math, Ekaterinburg, Russia

[2] Labfer Ltd, Ekaterinburg, Russia

来源：

FERROELECTRICS | 2017年 / 508卷 / 01期

关键词：

Lithium niobate; domain engineering; focused ion beam patterning; ELECTRON-BEAM; WAVE-GUIDES; LINBO3; INVERSION; CRYSTALS; FABRICATION; NANOSCALE; FIELD; RAMAN;

D O I：

10.1080/00150193.2017.1286214

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Formation of isolated domains induced by i-beam irradiation in single crystals of congruent lithium niobate with polar surface covered by uniform resist layer was studied. The change of domain shape with dose increase was attributed to gradual penetration of charge through the resist layer caused by i-beam milling. The appearance of the dendrite structures was attributed to formation of the surface dielectric gap due to out-diffusion of oxygen to electrode. We applied the obtained knowledge for creation of the 1-mu m-period 2D square arrays of isolated domains with minimal radius about 300nm and the 1-mu m-period 1D pattern of stripe domains.

引用

页码：16 / 25

页数：10

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