Indentation deformation of mesoporous anodic aluminum oxide

被引：6

作者：

Fang, Te-Hua ^{[1
]}

Wang, Tong Hong ^{[2
]}

Kang, Shao-Hui ^{[1
]}

Chuang, Cheng-Hsin ^{[3
]}

机构：

[1] Natl Formosa Univ, Inst Mech & Electromech Engn, Yunlin 632, Taiwan

[2] Adv Semicond Engn Inc, Stress Thermal Lab, Kaohsiung 811, Taiwan

[3] So Taiwan Univ, Dept Mech Engn, Tainan 710, Taiwan

来源：

CURRENT APPLIED PHYSICS | 2009年 / 9卷 / 04期

关键词：

Indentation; Anodic aluminum oxide (AAO); Anodization; Mesoporous; Atomic force microscope; NANOINDENTATION; ARRAYS;

D O I：

10.1016/j.cap.2008.08.034

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Mechanical properties of anodic alminum oxides (AAO) were achieved by means of-a scanning electron microscope (SEM), an atomic force microscope (AFM), and indentation measurements. A two-step anodized mesoporous anodic aluminum oxide was successfully fabricated vertically and hollowly. Both microindentation and nanoindentation were carried Out. Localized pop-in can be found during nanoindentation due to the collapse of the beneath cylindrical sturctures. Over a certain load, microindentation may induce radial cracks from the indented edge to outward of the AAO. The underside of the indented AAO sample was milled to figure out the structural changes. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：880 / 883

页数：4

共 13 条

[1] Selective growth of carbon nanotubes for nanoscale transistors [J].

Choi, WB ;

Cheong, BH ;

Kim, JJ ;

Chu, J ;

Bae, E .

ADVANCED FUNCTIONAL MATERIALS, 2003, 13 (01) :80-84

[2] Functional nanoscale electronic devices assembled using silicon nanowire building blocks [J].

Cui, Y ;

Lieber, CM .

SCIENCE, 2001, 291 (5505) :851-853

[3] Effect of phase transformations on the shape of the unloading curve in the nanoindentation of silicon [J].

Domnich, V ;

Gogotsi, Y ;

Dub, S .

APPLIED PHYSICS LETTERS, 2000, 76 (16) :2214-2216

[4] Formation of highly ordered arrays of dimples on tantalum at the nanoscale [J].

El-Sayed, Hany ;

Singh, Sherdeep ;

Greiner, Mark T. ;

Kruse, Peter .

NANO LETTERS, 2006, 6 (12) :2995-2999

[5] Physical behavior of nanoporous anodic alumina using nanoindentation and microhardness tests [J].

Fang, Te-Hua ;

Wang, Tong Hong ;

Liu, Chien-Hung ;

Ji, Liang-Wen ;

Kang, Shao-Hui .

NANOSCALE RESEARCH LETTERS, 2007, 2 (08) :410-415

[6]

Fischer-Cripps A.C., 2002, MECH ENG S

[7] Strengthened porous alumina membrane tube prepared by means of internal anodic oxidation [J].

Itoh, N ;

Tomura, N ;

Tsuji, T ;

Hongo, M .

MICROPOROUS AND MESOPOROUS MATERIALS, 1998, 20 (4-6) :333-337

[8] Hexagonal pore arrays with a 50-420 nm interpore distance formed by self-organization in anodic alumina [J].

Li, AP ;

Muller, F ;

Birner, A ;

Nielsch, K ;

Gosele, U .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (11) :6023-6026

[9] Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution [J].

Masuda, H ;

Hasegwa, F ;

Ono, S .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (05) :L127-L130

[10]

Palmqvist S., 1957, Jernkontorets Ann, V141, P303

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