Versatile full-vectorial finite element model for crossed gratings

被引:25
作者
Demesy, Guillaume [1 ,2 ]
Zolla, Frederic [1 ]
Nicolet, Andre [1 ]
Commandre, Mireille [1 ]
机构
[1] Univ Aix Marseille, Ecole Cent Marseille, Inst Fresnel, F-13013 Marseille, France
[2] STMicroelect, F-13106 Rousset, France
关键词
ELECTROMAGNETIC-WAVES; DIFFRACTION; IMPLEMENTATION; FORMULATION;
D O I
10.1364/OL.34.002216
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate the accuracy of the finite-element method to calculate the diffraction efficiencies of an arbitrarily shaped crossed grating in a multilayered stack illuminated by an arbitrarily polarized plane wave under oblique incidence. The method has been validated by using classical cases found in the literature. Finally, to illustrate the independence of our method with respect to the shape of the diffractive object, we present the global energy balance resulting from the diffraction of a plane wave by a lossy thin torus crossed grating. (C) 2009 Optical Society of America
引用
收藏
页码:2216 / 2218
页数:3
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