Self-heating effects in polycrystalline silicon thin film transistors

被引:11
作者
Valletta, Antonio [1 ]
Moroni, Alessandro [1 ]
Mariucci, Luigi [1 ]
Bonfiglietti, Alessandra [1 ]
Fortunato, Guglielmo [1 ]
机构
[1] CNR, IFN, I-00156 Rome, Italy
关键词
D O I
10.1063/1.2337108
中图分类号
O59 [应用物理学];
学科分类号
摘要
Self-heating effects are investigated in polycrystalline silicon thin film transistors by combining experimental measurements and two-dimensional numerical simulations. From the thermodynamic model the temperature distribution was extracted and found rather uniform along the channel. This allowed the authors to introduce a simplified method to determine the channel temperature when the device is affected by self-heating effects. (c) 2006 American Institute of Physics.
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页数:3
相关论文
共 9 条
[1]   Electrical characterization of directionally solidified polycrystalline silicon [J].
Bonfiglietti, A ;
Valletta, A ;
Gaucci, P ;
Mariucci, L ;
Fortunato, G ;
Brotherton, SD .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (03)
[2]  
Brotherton S., 2001, ASIA DISPLAYIDW 01 P, V387
[3]   Analysis of degradation phenomenon caused by self-heating in low-temperature-processed polycrystalline silicon thin film transistors [J].
Inoue, S ;
Ohshima, H ;
Shimoda, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (11A) :6313-6319
[4]  
KOYANAGI M, 1993, TECH DIG INT ELECT D, P97
[5]   PHYSICAL ORIGIN OF NEGATIVE DIFFERENTIAL RESISTANCE IN SOI TRANSISTORS [J].
MCDAID, LJ ;
HALL, S ;
MELLOR, PH ;
ECCLESTON, W ;
ALDERMAN, JC .
ELECTRONICS LETTERS, 1989, 25 (13) :827-828
[6]  
MOTAI T, 2002, INT WORKSH ACT MATR, P21
[7]   Sequential lateral solidification of thin silicon films on SiO2 [J].
Sposili, RS ;
Im, JS .
APPLIED PHYSICS LETTERS, 1996, 69 (19) :2864-2866
[8]   MEASUREMENT AND MODELING OF SELF-HEATING IN SOI NMOSFETS [J].
SU, LT ;
CHUNG, JE ;
ANTONIADIS, DA ;
GOODSON, KE ;
FLIK, MI .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (01) :69-75
[9]   Degradation in low-temperature poly-si thin film transistors depending on grain boundaries [J].
Uraoka, Y ;
Kitajima, K ;
Kirimura, H ;
Yano, H ;
Hatayama, T ;
Fuyuki, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (5A) :2895-2901