A novel and flexible processing for hot embossing of glass microfluidic channels

被引:12
作者
Jiang, Kai [1 ]
Li, Kangsen [1 ]
Xu, Gang [1 ]
Gong, Feng [1 ]
Wu, Xiaoyu [1 ]
Diao, Dongfeng [1 ]
Zhu, Likuan [1 ]
机构
[1] Shenzhen Univ, Coll Mechatron & Control Engn, Guangdong Prov Key Lab Micro Nano Optomechatron E, Shenzhen 518060, Peoples R China
关键词
Hot embossing; Low-T-g glass microfluidic channels; High-T-g glass mold insert; Morphology evolution; FABRICATION; LIQUIDS;
D O I
10.1016/j.ceramint.2020.09.253
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Hot embossing of glass microfluidic channels has great potential for applications in the field of medical diagnosis, biochemical analysis, and optical sensors. However, to fabricate the high-temperature resistance, ultrahard, and durable micro mold insert is a big challenge for the glass embossing techniques. . In this study, we proposed a new type of glass embossing techniques that a glass mold insert with high transition temperature (T-g) was manufactured in the supercooled liquid region and it was then used for the low-T-g glass embossing processing. To verify the flexibility and reliability of the embossing processing using the high-T-g glass mold insert, the detailed characterizations were conducted to study the morphology evolution and time-temperature-transformation for the high-T-g glass mold insert and low-T-g glass microfluidic channels. The experimental results showed that the high-T-g glass mold insert has a very fine surface quality and high flexibility. The high-T-g glass, which has remarkable high-temperature resistance and hot-forming ability, is proved to be a flexible and new ideal material as the hot embossing mold insert for low-T-g glass microfluidic channels. This work provides a new type of the hot embossing techniques for amorphous materials.
引用
收藏
页码:1447 / 1455
页数:9
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