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Study of a Palladium (Pd)/Aluminum-Doped Zinc Oxide (AZO) Hydrogen Sensor and the Kalman Algorithm for Internet-of-Things (IoT) Application
被引:16
作者:
Chen, Wei-Cheng
[1
]
Niu, Jing-Shiuan
[1
]
Liu, I-Ping
[2
]
Chi, Cheng-Yu
[1
]
Cheng, Shiou-Ying
[3
]
Lin, Kun-Wei
[4
]
Liu, Wen-Chau
[1
]
机构:
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan
[2] CPC Corp, Green Technol Res Inst, Dept Mat Technol, Kaohsiung 81126, Taiwan
[3] Natl Ilan Univ, Dept Elect Engn, Yilan 26047, Taiwan
[4] Chaoyang Univ Technol, Dept Comp Sci & Informat Engn, Taichung 413310, Taiwan
关键词:
Aluminum-doped zinc oxide (AZO);
hydrogen sensor;
Internet of Things (IoT);
Kalman algorithm;
Pd;
RF sputtering;
AL-DOPED ZNO;
H-2 SENSING PERFORMANCE;
GAS;
FILMS;
NANOPARTICLES;
PD;
TECHNOLOGIES;
NIO;
D O I:
10.1109/TED.2020.3018084
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the catalytic activity of the Pd metal, the studied thin film-based device shows remarkably enhanced hydrogen-sensing characteristics. Experimentally, a very high sensing response of 1.12 x 10(4) with a response time of 23 s is obtained under 1% H-2/air gas at 300 degrees C. Furthermore, even under an extremely low concentration of 40-ppb H-2/air, a sensing response of 0.17 is acquired. The optimal operating temperature of the studied device is 300 degrees C. A hypothesis is used to interpret the related hydrogen-sensing mechanism of the studied device. A thermodynamic analysis is employed to study the surface coverage of hydrogen molecules on the device's surface. Furthermore, for the application in wireless transmission of the Internet of Things (IoT), an interesting Kalman algorithm is used to reduce redundant data, save hardware costs, and reduce network congestion. The simulated results show that 93.9% of the redundant data can be removed. The studied device exhibits advantages of a simple structure, easy fabrication, low cost, a widespread sensing range of hydrogen concentration, a very high sensing response, and an extremely low detecting limit, as well as being suitable for IoT application.
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页码:4405 / 4412
页数:8
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