MEMS-BASED HIGH-Q FABRY-PEROT FILTERS

被引：0

作者：

Lin, Yu-Sheng ^{[1
]}

Lee, Chengkuo ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

来源：

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2014年

关键词：

MEMS; Microoptics; Fabry-Perot Filter; SILICON;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall of the FP resonator to enhance the performance of a tunable FP filter. Attributed to the ARG structures, the light can be propagated effectively through the FP resonator. The experimental result shows a low driving voltage electrostatically tuned the device with a wide mechanical tuning range (more than 1600 nm with 4 V) and a high Q-factor (9762).

引用

页码：115 / 116

页数：2

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