Design of electro-thermal micro-actuators: Mechanics and electronic position detection

被引：0
|
作者：
Lazarov, Kalin V. [1 ]
Enikov, Eniko T. [2 ]
机构：
[1] Univ Arizona, Adv Microsyst Lab, Tucson, AZ 85721 USA
[2] Univ Arizona, Dept Aerosp & Mech, Tucson, AZ 85721 USA
来源：
MICROSYSTEMS MECHANICAL DESIGN | 2006年 / 478期
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D O I：
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中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This chapter is devoted to the design of electro-thermal micro-actuators with capacitive position feedback. Analytical and finite element solutions of the electro-thermal and thermo-elastic problems are presented. A separate section is devoted to the challenging problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. These are illustrated with examples of electronic measurement circuits tested by the authors.
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页码：101 / +
页数：2
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