Lowering the reset current and power consumption of Phase-Change Memories with carbon-doped Ge2Sb2Te5

被引:0
|
作者
Hubert, Q. [1 ,2 ]
Jahan, C. [1 ]
Toffoli, A. [1 ]
Navarro, G. [1 ]
Chandrashekar, S. [1 ]
Noe, P. [1 ]
Blachier, D. [1 ]
Sousa, V. [1 ]
Perniola, L. [1 ]
Nodin, J-F. [1 ]
Persico, A. [1 ]
Kies, R. [1 ]
Maitrejean, S. [1 ]
Roule, A. [1 ]
Henaff, E. [1 ]
Tessaire, M. [1 ]
Zuliani, P. [3 ]
Annunziata, R. [3 ]
Pananakakis, G. [2 ]
Reimbold, G. [1 ]
De Salvo, B. [1 ]
机构
[1] CEA, LETI, MINATEC Campus,17 Rue martyrs, F-38054 Grenoble 9, France
[2] IMEP LAHC, F-38016 Grenoble 1, France
[3] Technol R & D, STMicroelect, I-20041 Agrate Brianza, Italy
来源
2012 4TH IEEE INTERNATIONAL MEMORY WORKSHOP (IMW) | 2012年
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中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
In this paper, a detailed investigation of the electrical performances of Phase-Change Memory test devices integrating carbon-doped Ge2Sb2Te5 (named GST-C) is reported. PCM devices with 5% of carbon atomic content yields more than 50% of current reduction compared to reference GST devices, with a programming window widely superior to two orders of magnitude and a cycling endurance up to 10(8) cycles. The reset current reduction is finally validated on shrinked wall-like test devices, proving that carbon-doped GST is a high promising material for future PCM technology.
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页数:4
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