High-shock silicon accelerometer with suspended piezoresistive sensing bridges

被引：24

作者：

Bae, Kong Myeong ^{[1
]}

Lee, Jae Min ^{[1
]}

Kwon, Ki Beom ^{[2
]}

Han, Ki-Ho ^{[3
]}

Kwon, Nam Yeol ^{[4
]}

Han, Jeong Sam ^{[2
]}

Ko, Jong Soo ^{[1
]}

机构：

[1] Pusan Natl Univ, Grad Sch Mech Engn, Pusan 609735, South Korea

[2] Andong Natl Univ, Depratment Mech Design Engn, Andong 760749, South Korea

[3] Inje Univ, Depratment Nano Sci & Engn, Gimhae 621749, South Korea

[4] Poongsan FNS Corp, Nonsan 320822, South Korea

来源：

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | 2014年 / 28卷 / 04期

基金：

新加坡国家研究基金会;

关键词：

Accelerometer; High-shock; Optimal; Piezoresistive; Wheatstone bridge; OPTIMIZATION; FABRICATION; FORCE;

D O I：

10.1007/s12206-014-0131-5

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A high-shock 2000 g accelerometer with suspended piezoresistive sensing bridges has been designed, fabricated, and tested. Structural size of the accelerometer has been obtained through an optimal design process. Four resistors are electrically connected to form a Wheatstone bridge circuit. A sensitivity of 25.5 mu V/g has been measured from the fabricated accelerometer with a nonlinearity of 0.2% in an acceleration range within 2000 g. The real-time response of the fabricated accelerometers accurately follows the reference accelerometer. The newly fabricated accelerometer has survived an over-shock condition of 4667 g.

引用

页码：1449 / 1454

页数：6

共 22 条

[1]

*AN DEV, 1995, ADXL05 MON ACC SIGN

[2] Review: Semiconductor Piezoresistance for Microsystems [J].

Barlian, A. Alvin ;

Park, Woo-Tae ;

Mallon, Joseph R., Jr. ;

Rastegar, Ali J. ;

Pruitt, Beth L. .

PROCEEDINGS OF THE IEEE, 2009, 97 (03) :513-552

[3]

CHEN PL, 1982, IEEE T ELECTRON DEV, V29, P27, DOI 10.1109/T-ED.1982.20654

[4]

Danel S., 1990, SENSOR ACTUAT A-PHYS, V23, P971

[5] A silicon micromachined high-shock accelerometer with a bonded hinge structure [J].

Fan, Kebin ;

Che, Lufeng ;

Xiong, Bin ;

Wang, Yuelin .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (06) :1206-1210

[6] Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications [J].

Han, JS ;

Jong, SK ;

Korvink, JG .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (11) :1585-1596

[7] Efficient optimisation of transient dynamic problems in MEMS devices using model order reduction [J].

Han, JS ;

Rudnyi, EB ;

Korvink, JG .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (04) :822-832

[8] Robust optimization using a gradient index: MEMS applications [J].

Han, JS ;

Kwak, BM .

STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION, 2004, 27 (06) :469-478

[9]

MEGGITT, 2013, MOD 71M SER PIEZ ACC

[10] FABRICATION AND CHARACTERIZATION OF HIGH G-FORCE, SILICON PIEZORESISTIVE ACCELEROMETERS [J].

NING, YB ;

LOKE, Y ;

MCKINNON, G .

SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (01) :55-61

← 1 2 3 →