Bistabilities in pyrolytic laser-CVD of silicon and carbon

被引：7
作者：
Kargl, PB [1 ]
Arnold, N [1 ]
Bauerle, D [1 ]
机构：
[1] JOHANNES KEPLER UNIV,A-4040 LINZ,AUSTRIA
来源：
APPLIED SURFACE SCIENCE | 1997年 / 108卷 / 02期
关键词：
D O I：
10.1016/S0169-4332(96)00592-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In pyrolytic laser-CVD of silicon and carbon, bistable growth with a pronounced hysteresis was observed within certain regimes of scanning velocities and laser powers. In order to study the influence of changes in heat conductivities and activation energy, we have deposited onto different substrate materials silicon from SiH4 and Si4H6 and carbon from CH4,C2H2' and C(2)H4.
引用
收藏
页码：257 / 262
页数：6
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