Friction force microscopy characterization of semiconductor heterostructures

被引：4
作者：
Tamayo, J [1 ]
Garcia, R [1 ]
机构：
[1] CSIC, INST MICROELECT MADRID, MADRID 28760, SPAIN
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1996年 / 42卷 / 1-3期
关键词：
gallium; indium; multiquantum wells; semiconductors;
D O I：
10.1016/S0921-5107(96)01692-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Measurement of frictional forces in a scanning force microscopy has been applied to perform compositional characterization of semiconductor heterostructures. Semiconductor interfaces as well as multiquantum wells are resolved with 3 nm of spatial resolution. The chemical sensitivity of this method is studied by imaging a step graded InxGa1-xAs sample. Changes of 10% in indium (or gallium) composition are detected. These results point out the potential of friction force microscopy for simultaneous topography and compositional characterization of semiconductor materials.
引用
收藏
页码：122 / 126
页数：5
相关论文
共 23 条
  • [1] [Anonymous], 1992, INTERMOLECULAR SURFA
  • [2] TRIBOLOGICAL STUDIES OF SILICON FOR MAGNETIC RECORDING APPLICATIONS
    BHUSHAN, B
    KOINKAR, VN
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) : 5741 - 5746
  • [3] ATOMIC FORCE MICROSCOPE
    BINNIG, G
    QUATE, CF
    GERBER, C
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
  • [4] BUSHAN B, 1995, NATURE, V374, P607
  • [5] SCANNING FORCE MICROSCOPY IN BIOLOGY
    BUSTAMANTE, C
    KELLER, D
    [J]. PHYSICS TODAY, 1995, 48 (12) : 32 - 38
  • [6] Colchero J., 1992, Physica Status Solidi A, V131, P73, DOI 10.1002/pssa.2211310112
  • [7] FUNCTIONAL-GROUP IMAGING BY CHEMICAL FORCE MICROSCOPY
    FRISBIE, CD
    ROZSNYAI, LF
    NOY, A
    WRIGHTON, MS
    LIEBER, CM
    [J]. SCIENCE, 1994, 265 (5181) : 2071 - 2074
  • [8] DYNAMICAL FRICTION COEFFICIENT MAPS USING A SCANNING FORCE AND FRICTION MICROSCOPE
    LABARDI, M
    ALLEGRINI, M
    SALERNO, M
    FREDIANI, C
    ASCOLI, C
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 59 (01): : 3 - 10
  • [9] REVERSIBLE DISPLACEMENT OF CHEMISORBED N-ALKANETHIOL MOLECULES ON AU(111) SURFACE - AN ATOMIC-FORCE MICROSCOPY STUDY
    LIU, GY
    SALMERON, MB
    [J]. LANGMUIR, 1994, 10 (02) : 367 - 370
  • [10] Sensitivity of frictional forces to pH on a nanometer scale: A lateral force microscopy study
    Marti, A
    Hahner, G
    Spencer, ND
    [J]. LANGMUIR, 1995, 11 (12) : 4632 - 4635
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