Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels

被引:65
作者
Mariotti, Davide [1 ]
Shimizu, Yoshiki [1 ]
Sasaki, Takeshi [1 ]
Koshizaki, Naoto [1 ]
机构
[1] AIST, Nanoarchitect Res Ctr, NARC, Tsukuba, Ibaraki 3058565, Japan
关键词
D O I
10.1063/1.2390631
中图分类号
O59 [应用物理学];
学科分类号
摘要
A simple model and method is proposed here to determine argon metastable number densities and electron temperature with the assumption of a Maxwell-Boltzmann electron energy distribution. This method is based on the availability of experimental relative emission intensities of only four argon lines that originate from any of the 4p argon levels. The proposed model has a relatively wide range of validity for laboratory plasmas that contain argon gas and can be a valuable tool for the emerging field of atmospheric microplasmas, for which diagnostics is still limited. (c) 2006 American Institute of Physics.
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页数:3
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共 22 条
[1]   INFLUENCE OF ATOM-ATOM COLLISIONS ON THERMAL-EQUILIBRIUM IN ARGON ARC DISCHARGES AT ATMOSPHERIC-PRESSURE [J].
BACRI, J ;
GOMES, AM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1978, 11 (16) :2185-2197
[2]   ELECTRON-IMPACT EXCITATION OF ARGON ATOM [J].
BALLOU, JK ;
LIN, CC ;
FAJEN, FE .
PHYSICAL REVIEW A, 1973, 8 (04) :1797-1807
[3]   Electron-impact excitation from the (3p54s) metastable states of argon [J].
Bartschat, K ;
Zeman, V .
PHYSICAL REVIEW A, 1999, 59 (04) :R2552-R2554
[4]   Measurement of electron-impact excitation cross sections out of metastable levels of argon and comparison with ground-state excitation [J].
Boffard, JB ;
Piech, GA ;
Gehrke, MF ;
Anderson, LW ;
Lin, CC .
PHYSICAL REVIEW A, 1999, 59 (04) :2749-2763
[5]   Application of excitation cross sections to optical plasma diagnostics [J].
Boffard, JB ;
Lin, CC ;
DeJoseph, CA .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 37 (12) :R143-R161
[6]   MODELING OF METASTABLE ARGON ATOMS IN A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R .
PHYSICAL REVIEW A, 1995, 52 (05) :3743-3751
[7]   Measurement of electron-impact excitation into the 3p54p levels of argon using Fourier-transform spectroscopy [J].
Chilton, JE ;
Boffard, JB ;
Schappe, RS ;
Lin, CC .
PHYSICAL REVIEW A, 1998, 57 (01) :267-277
[8]   Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry [J].
Czerwiec, T ;
Greer, F ;
Graves, DB .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2005, 38 (24) :4278-4289
[9]  
Dasgupta A., 1999, PHYS REV A, V61
[10]   Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy [J].
Donnelly, VM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 37 (19) :R217-R236