Method for improving measurement efficiency of lateral shearing interferometry

被引：3

作者：

Li, Jie ^{[1
]}

Tang, Feng ^{[2
]}

Wang, Xiangzhao ^{[2
]}

Dai, Fengzhao ^{[2
]}

Ding, Lei ^{[1
]}

Chen, Bo ^{[1
]}

Yang, Xiaoyu ^{[1
]}

Chai, Liqun ^{[1
]}

机构：

[1] China Acad Engn Phys, Res Ctr Laser Fusion, Mianyang, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Optic & Fine Mech, Shanghai, Peoples R China

来源：

OPTICAL ENGINEERING | 2017年 / 56卷 / 02期

关键词：

interferometry; phase measurement; metrology; WAVE-FRONT RECONSTRUCTION; ZERNIKE POLYNOMIALS; INTERFEROGRAMS;

D O I：

10.1117/1.OE.56.2.024107

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The computation time of wavefront reconstruction is decreased by sampling the difference fronts in the present study. The wavefront can be reconstructed with high accuracy up to 64 Zernike terms with only 32 x 32 sampled pixels. Furthermore, the computational efficiency can be improved by a factor of more than 1000, and the measurement efficiency of lateral shearing interferometry is improved. The influence of the terms used to reconstruct the wavefront, the grid size of the test wavefront, the shear ratio, and the random noise on the reconstruction accuracy is analyzed and compared, when the difference fronts are sampled with different grid sizes. Numerical simulations and experiments show that the relative reconstruction error is < 5% if the grid size of the sampled difference fronts is more than four times the radial order of difference Zernike polynomials with a reasonable noise level and shear ratio. (C) 2017 Society of Photo-Optical Instrumentation Engineers

引用

页数：10

共 20 条

[1]

[Anonymous], 2003, THESIS

[2] Multiple-wave lateral shearing interferometry for wave-front sensing [J].

Chanteloup, JC .

APPLIED OPTICS, 2005, 44 (09) :1559-1571

[3] Generalized zonal wavefront reconstruction for high spatial resolution in lateral shearing interferometry [J].

Dai, Fengzhao ;

Tang, Feng ;

Wang, Xiangzhao ;

Sasaki, Osami .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2012, 29 (09) :2038-2047

[4] Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms [J].

Dai, Fengzhao ;

Tang, Feng ;

Wang, Xiangzhao ;

Sasaki, Osami ;

Feng, Peng .

APPLIED OPTICS, 2012, 51 (21) :5028-5037

[5] Modal wave-front reconstruction with zernike polynomials and Karhunen-Loeve functions [J].

Dai, GM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (06) :1218-1225

[6] Analysis of lateral shearing interferograms by use of Zernike polynomials [J].

Harbers, G ;

Kunst, PJ ;

Leibbrandt, GWR .

APPLIED OPTICS, 1996, 35 (31) :6162-6172

[7] Recent progress of EUV wavefront metrology in EUVA [J].

Hasegawa, M ;

Ouchi, C ;

Hasegawa, T ;

Kato, S ;

Ohkubo, A ;

Suzuki, A ;

Sugisaki, K ;

Okada, M ;

Otaki, K ;

Murakami, K ;

Saito, J ;

Niibe, M ;

Takeda, M .

ADVANCES IN MIRROR TECHNOLOGY FOR X-RAY, EUV LITHOGRAPHY, LASER, AND OTHER APPLICATIONS II, 2004, 5533 :27-36

[8]

Jorge N., 2006, LEAST SQUARES PROBLE

[9] Wavefront reconstruction for lateral shearing interferometry based on difference polynomial fitting [J].

Li, Jie ;

Tang, Feng ;

Wang, Xiangzhao ;

Dai, Fengzhao ;

Feng, Peng ;

Li, Sikun .

JOURNAL OF OPTICS, 2015, 17 (06)

[10] Piston error calibration of zonal reconstruction for a segmented wavefront in lateral shearing interferometry [J].

Li, Jie ;

Tang, Feng ;

Wang, Xiangzhao ;

Dai, Fengzhao ;

Feng, Peng .

APPLIED OPTICS, 2015, 54 (13) :4180-4187

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