Optical communication link using micromachined corner cube reflector

An optical communication link using a micromachined corner cube reflector (CCR) was demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating laser from a 5mW laser source. The surface micromachined CCRs are made of 250 mu m square hinged polysilicon plates and have measured reflectance ranging from 34% to 77% for different mirror designs. Light reflected by the CCRs has a divergence ranging from 15-35mrad. The CCRs are electrostatically actuated with 10 to 20V. The highest data rate transmitted with a CCR is 1K bps. Theoretical analysis and some dynamic optical test results of the device are presented.