Experimental and theoretical study of the laser micromachining of glass using a high-repetition-rate ultrafast laser

We present a systematic study of the ultrafast laser micro-machining of glass using a Ti:Spp laser with moderate pulse energy (< 5 mu J) at a high repetition rate (50 kHz). Optimal conditions were identified for high-resolution surface laser etching, and via drilling. Several practical applications were developed: glass templates for micro fluid diffraction devices, phase gratings for excimer laser projection techniques, micro fluid vertical channel-connectors, etc.. It is demonstrated that the interaction of ultrafast laser pulses with glass combines several different processes (direct ablation, explosive material ejection, and thermal material modification). A dynamic numerical model was developed for, this process. It was successfully used for modelling of laser micro-machining with arbitrary 3D translations of the target.