A 240-GHz Wideband Ridged Waveguide Filter Based on MEMS Process

被引：6

作者：

Ding, Jiangqiao ^{[1
]}

Hu, Jie ^{[2
,3
]}

Liu, Dong ^{[2
,3
]}

Wang, Daowei ^{[2
,3
]}

Shi, Shengcai ^{[2
,3
]}

Wu, Wen ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Elect & Opt Engn, Nanjing 210094, Jiangsu, Peoples R China

[2] Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Peoples R China

[3] Key Lab Radio Astron, Nanjing 210008, Peoples R China

来源：

JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES | 2017年 / 38卷 / 03期

基金：

中国国家自然科学基金;

关键词：

THz; Wideband; Ridged waveguide; BPF; MEMS; SUBSTRATE;

D O I：

10.1007/s10762-016-0332-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Terahertz (THz) bandpass filter (BPF) is one of important components in some detectors for astronomical observations. In this paper, a BPF with a relative bandwidth of 50% centered at 240 GHz is presented. This wideband BPF is made up of six ridged waveguide resonators and developed by silicon-based micro-electro-mechanical systems (MEMS) process. The transmission response of the filter is measured by a quasi-optical setup incorporating a sensitive superconducting mixer, and the result is in good agreement with the simulated one. Details of the design, simulation, and measurement are discussed in this paper.

引用

页码：283 / 291

页数：9

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