The micro-EDM machining technique has been broadly applied to fabricate 2D and 3D micro-parts. It is difficult to produce a metal mold with dimension from several CM and with the accuracy in the level of mu m. Poor accuracy comes from electrode wear during 3D micro-EDM machining. In this research, an efficient wear compensation cooperated with CAD/CAM path compensation is provided to improve the machining accuracy. In the experiments, by fabricating a micro-gear and sculpturing letters on surface of tiny steel ball, the technique provided in this research shows the expected results successfully.