Hydrogen interaction with dislocations in Si

被引:27
作者
Ewels, CP [1 ]
Leoni, S
Heggie, MI
Jemmer, P
Hernández, E
Jones, R
Briddon, PR
机构
[1] Univ Sussex, CPES, Brighton BN1 9QJ, E Sussex, England
[2] Univ Exeter, Sch Phys, Exeter EX4 4PY, Devon, England
[3] Univ Newcastle Upon Tyne, Dept Phys, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England
关键词
D O I
10.1103/PhysRevLett.84.690
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
An H plasma has a remarkable effect on dislocation mobility in silicon, reducing its activation energy to 1.2 eV. Applying density functional theory to the interactions of H and H? With the core of the 90 degrees partial dislocation in Si, we have identified a path for motion involving kink formation and migration at hydrogenated core bonds which conforms exactly to the experimentally measured activation energy.
引用
收藏
页码:690 / 693
页数:4
相关论文
共 40 条
[1]  
Alexander H, 1999, PHYS STATUS SOLIDI A, V171, P5, DOI 10.1002/(SICI)1521-396X(199901)171:1<5::AID-PSSA5>3.0.CO
[2]  
2-L
[3]   PSEUDOPOTENTIALS THAT WORK - FROM H TO PU [J].
BACHELET, GB ;
HAMANN, DR ;
SCHLUTER, M .
PHYSICAL REVIEW B, 1982, 26 (08) :4199-4228
[4]   Period-doubled structure for the 90 degrees partial dislocation in silicon [J].
Bennetto, J ;
Nunes, RW ;
Vanderbilt, D .
PHYSICAL REVIEW LETTERS, 1997, 79 (02) :245-248
[5]   ATOMIC AND ELECTRONIC-STRUCTURES OF THE 90-DEGREES PARTIAL DISLOCATION IN SILICON [J].
BIGGER, JRK ;
MCINNES, DA ;
SUTTON, AP ;
PAYNE, MC ;
STICH, I ;
KINGSMITH, RD ;
BIRD, DM ;
CLARKE, LJ .
PHYSICAL REVIEW LETTERS, 1992, 69 (15) :2224-2227
[6]   Smart-cut: A new silicon on insulator material technology based on hydrogen implantation and wafer bonding [J].
Bruel, M ;
Aspar, B ;
AubertonHerve, AJ .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (3B) :1636-1641
[7]   ATOMIC MODES OF DISLOCATION MOBILITY IN SILICON [J].
BULATOV, VV ;
YIP, S ;
ARGON, AS .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1995, 72 (02) :453-496
[8]   HYDROGEN-BONDING AND DIFFUSION IN CRYSTALLINE SILICON [J].
CHANG, KJ ;
CHADI, DJ .
PHYSICAL REVIEW B, 1989, 40 (17) :11644-11653
[9]   STATE AND MOTION OF HYDROGEN IN CRYSTALLINE SILICON [J].
DEAK, P ;
SNYDER, LC ;
CORBETT, JW .
PHYSICAL REVIEW B, 1988, 37 (12) :6887-6892
[10]  
HASSEN P, 1989, I PHYS C SER, V104, P361