Reduction of hole transit time in GaAs MSM photodetectors by p-type delta-doping

被引:4
作者
Chyi, JI [1 ]
Chien, YJ [1 ]
Yuang, RH [1 ]
Shieh, JL [1 ]
Pan, JW [1 ]
Chen, JS [1 ]
机构
[1] NATL SCI COUNCIL,PRECIS INSTRUMENT DEV CTR,HSINCHU 30077,TAIWAN
关键词
D O I
10.1109/68.541571
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The temporal responses of the undoped, n-type, and p-type delta-doped GaAs metal-semiconductor-metal photodetectors were systematically studied. The full-width at half-maximum of the temporal response is significantly improved at low bias for the F-doped detectors compared to the conventional undoped one. The p-type delta-doped detector exhibits the smallest fall-time, and hence the highest bandwidth, because the induced electric field in the absorption region facilitates the transport of the photogenerated holes. In addition, the p-type delta-doped detector also gives the highest peak amplitude of the temporal response. Two dimensional simulation on the internal electrical field distribution in the detectors is consistent with the experimental results.
引用
收藏
页码:1525 / 1527
页数:3
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