Thermal conductivity of diamond-like carbon films

被引:193
|
作者
Shamsa, M.
Liu, W. L.
Balandin, A. A. [1 ]
Casiraghi, C.
Milne, W. I.
Ferrari, A. C.
机构
[1] Univ Calif Riverside, Dept Elect Engn, Riverside, CA 92521 USA
[2] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2362601
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors report the thermal conductivity (K) of a variety of carbon films ranging from polymeric hydrogenated amorphous carbons (a-C:H) to tetrahedral amorphous carbon (ta-C). The measurements are performed using the 3 omega method. They show that thermal conduction is governed by the amount and structural disorder of the sp(3) phase. If the sp(3) phase is amorphous, K scales linearly with the C-C sp(3) content, density, and elastic constants. Polymeric and graphitic films have the lowest K (0.2-0.3 W/mK), hydrogenated ta-C:H has K similar to 1 W/mK, and ta-C has the highest K (3.5 W/mK). If the sp(3) phase orders, even in small grains such as in micro- or nanodiamond, a strong K increase occurs for a given density, Young's modulus, and sp(3) content. (c) 2006 American Institute of Physics.
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页数:3
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