The optical properties of hydrophilic Ti-doped Al2O3 films

被引：6

作者：

Lin, Su-Shia ^{[1
]}

机构：

[1] Natl Chi Nan Univ, Dept Appl Mat & Optoelect Engn, Puli 54561, Nantou Hsien, Taiwan

来源：

OPTICAL MATERIALS | 2014年 / 36卷 / 09期

关键词：

Film; Sputtering; Hydrophilicity; Optical properties; THIN-FILMS; ALUMINUM-OXIDE; HARD COATINGS; DEPOSITION; EVOLUTION; TEXTURE; MODEL;

D O I：

10.1016/j.optmat.2014.04.008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ti-doped Al2O3 (Al2O3:TO films were prepared by the simultaneous RF magnetron sputtering of Al2O3 and DC magnetron sputtering of Ti. The structure of the Al2O3:Ti film corresponded to Al2O3. Reducing RF power caused the formation of thinner fibers of Al2O3:Ti in the film, favoring the hydrophilicity and increasing the optical energy gap of the deposited film. When a thicker Al2O3:Ti film was deposited at a higher RF power, it contained thicker fibers, and had a lower surface roughness, higher visible transmission and a higher linear refractive index. The Al/Ti atomic ratio significantly affected the hydrophilicity and optical properties of Al2O3:Ti films. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：1488 / 1493

页数：6

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