Integration of self-assembling block copolymer materials into the lithographic process

被引：0
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作者：
Nealey, Paul F. [1 ]
机构：
[1] Univ Wisconsin, Dept Biol & Chem Engn, Madison, WI 53706 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2006年 / 231卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
57-COLL
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页数：1
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