Electron-Excited Energy Dispersive X-ray Spectrometry in the Variable Pressure Scanning Electron Microscope (EDS/VPSEM): It's Not Microanalysis Anymore!

被引：0

作者：

Newbury, Dale E. ^{[1
]}

Ritchie, Nicholas W. M. ^{[1
]}

机构：

[1] NIST, Gaithersburg, MD 20899 USA

来源：

SCANNING MICROSCOPIES 2015 | 2015年 / 9636卷

关键词：

DTSA-II; elemental analysis; energy dispersive x-ray spectrometry (EDS); scanning electron microscopy (SEM); silicon drift detector - energy dispersive x-ray spectrometer (SDD-EDS); quantitative analysis; x-ray microanalysis; variable pressure scanning electron microscopy (VPSEM);

D O I：

10.1117/12.2191088

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

X-ray spectra suffer significantly degraded spatial resolution when measured in the variable-pressure scanning electron microscope (VPSEM, chamber pressure 1 Pa to 2500 Pa) as compared to high-vacuum SEM (operating pressure < 10 mPa). Depending on the gas path length, electrons that are scattered hundreds of micrometers outside the focused beam can contribute 90% or more of the measured spectrum. Monte Carlo electron trajectory simulation, available in NIST DTSA-II, models the gas scattering and simulates mixed composition targets, e.g., particle on substrate. The impact of gas scattering at the major (C > 0.1 mass fraction), minor (0.01 <= C <= 0.1), and trace (C < 0.01) constituent levels can be estimated. NIST DTSA-II for Java-platforms is available free at: http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html).

引用

页数：13

共 5 条

[1]

DANILATOS GD, 1988, ADV ELECTRON EL PHYS, V71, P109

[2] PENETRATION AND ENERGY-LOSS THEORY OF ELECTRONS IN SOLID TARGETS [J].