Error analysis of ellipsoidal mirrors for soft X-ray focusing by wave-optical simulation

被引：29

作者：

Motoyama, Hiroto ^{[1
]}

Saito, Takahiro ^{[1
]}

Mimura, Hidekazu ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Engn, Dept Precis Engn, Bunkyo Ku, Tokyo 1138656, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 02期

关键词：

FREE-ELECTRON LASER; FABRICATION; NM;

D O I：

10.7567/JJAP.53.022503

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The ellipsoidal mirror is an ideal soft X-ray focusing optic that enables achromatic and highly efficient focusing to a nanometer spot size; however, a high-quality surface is necessary for ideal focusing. Knowledge of the required figure accuracy is important for fabrication. In this paper, we analyze the effects of figure errors on the focusing performance through wave-optical calculations based on the Fresnel-Kirchhoff diffraction theory, assuming coherent soft X-rays. Figure errors are classified into three types from the viewpoint of manufacturing. The effect of the alignment error is also investigated. The analytical results quantitatively indicate criteria regarding figure accuracy, which are expected to be essential for the development of high-performance ellipsoidal soft X-ray focusing mirrors. (C) 2014 The Japan Society of Applied Physics

引用

页数：6

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