Methods of simulating thin film deposition using spray pyrolysis techniques

被引：39

作者：

Filipovic, Lado ^{[1
]}

Selberherr, Siegfried ^{[1
]}

Mutinati, Giorgio C. ^{[2
]}

Brunet, Elise ^{[2
]}

Steinhauer, Stephan ^{[2
]}

Koeck, Anton ^{[2
]}

Teva, Jordi ^{[3
]}

Kraft, Jochen ^{[3
]}

Siegert, Joerg ^{[3
]}

Schrank, Franz ^{[3
]}

机构：

[1] TU Wien, Inst Microelect, A-1040 Vienna, Austria

[2] AIT GmbH, Mol Diagnost Hlth & Environm, A-1220 Vienna, Austria

[3] Ams AG, A-8141 Unterpremstatten, Austria

来源：

MICROELECTRONIC ENGINEERING | 2014年 / 117卷

关键词：

Spray pyrolysis deposition; Tin oxide film; Topography simulation; Level Set; Smart gas sensors; SENSORS; TRANSPARENT; LAYERS;

D O I：

10.1016/j.mee.2013.12.025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Integration of thin tin oxide film formation into CMOS technology is a fundamental step to realize sensitive smart gas sensor devices. Spray pyrolysis is a deposition technique which has the potential to fulfil this requirement. A model for spray pyrolysis deposition is developed and implemented within a Level Set framework. Two models for the topography modification due to spray pyrolysis deposition are presented, with an electric and a pressure atomizing nozzle. The resulting film growth is modeled as a layer by layer deposition of the individual droplets which reach the wafer surface or as a CVD-like process, depending on whether the droplets form a vapor near the interface or if they deposit a film only after surface collision. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：57 / 66

页数：10

共 35 条

[1]

[Anonymous], THESIS SWISS FEDERAL

[2]

[Anonymous], 1999, Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision, and Materials Science

[3]

[Anonymous], 2007, NUMERICAL RECIPES

[4] THIN-LAYERS DEPOSITED BY THE PYROSOL PROCESS [J].