Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces

被引:27
作者
Chen, Jianwei [1 ]
Cheng, Jiyi [1 ]
Zhang, Dapeng [1 ]
Chen, Shih-Chi [1 ]
机构
[1] Chinese Univ Hong Kong, Dept Mech & Automat Engn, Shatin, Hong Kong, Peoples R China
来源
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2016年 / 44卷
关键词
Vacuum-assisted imprinting; UV imprint; Artificial compound eye; Nonplanar surface; ARTIFICIAL COMPOUND EYE;
D O I
10.1016/j.precisioneng.2015.10.003
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports a vacuum-assisted UV imprinting system for parallel fabrication of micro-lens arrays on a spherical dome for artificial compound eye applications. Artificial compound eyes are a kind of micro-optics structure inspired by insect eyes. They offer unique optical characteristics, e.g., wide field of view (FOV), high sensitivity and light weight, in a compact arrangement with miniaturized lens arrays on a curved surface. In practice, it has been a great challenge to precisely fabricate micro-lens arrays on curved substrates at reasonable cost. The UV imprinting system was developed to ensure conformal contact between a soft elastomeric stamp and a convex substrate, i.e., dome, coated with UV-curable resins. The pressure-driven stamp enables large-area direct formation of high fill factor hexagonal micro lens arrays through soft UV imprint processes. The geometrical characteristics, surface quality and optical properties of the micro-lens array were characterized quantitatively, e.g., NA = 0.06; RMS similar to lambda/50. Lastly, the optical performance of the artificial compound eyes was demonstrated by an ultra-wide angle imaging experiment under uniform illumination. The vacuum imprinting system presents a new manufacturing platform for fabricating 3-dimensional structures on nonplanar substrates in a parallel and cost effective way. The fabricated compound eye structure will be particularly useful in the areas of multi-channel imaging, machine vision, and surveillance. (C) 2015 Elsevier Inc. All rights reserved.
引用
收藏
页码:70 / 74
页数:5
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