An investigation of the influence of thermal process on the electrical conductivity of LIFT printed Cu structures

被引:10
作者
Fogel, O. [1 ,2 ,3 ]
Toker, G. Bernstein [1 ]
Cohen-Taguri, G. [3 ]
Gergaud, P. [4 ]
Gaillard, F. [4 ]
Kotler, Z. [1 ]
Zalevsky, Z. [2 ,3 ]
机构
[1] Orbotech, AM Res Grp, Yavne, Israel
[2] Bar Ilan Univ, Fac Engn, IL-52900 Ramat Gan, Israel
[3] Bar Ilan Univ, Inst Nanotechnol & Adv Mat, IL-52900 Ramat Gan, Israel
[4] CEA Grenoble, Leti, Minatec Campus, F-38054 Grenoble, France
关键词
LIFT; laser induced forward transfer; 3D printing; annealing; copper; GRAIN-GROWTH; LASER; STRESS; FILMS; MICROSTRUCTURES; METALS;
D O I
10.1088/1361-6463/ab137e
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical properties of copper tracks printed by laser-induced-forward-transfer (LIFT) are typically inferior to the bulk values. Several limiting factors have been indicated such as oxidation, droplet boundaries and grain boundaries. However, the relative contribution of each of these factors has not been determined. To improve the electrical properties of LIFT printed structures, an analysis of various factors is essential. Here, we concentrate on the effect of post-printing thermal treatment on LIFT printed copper structures. A reduction in electrical resistivity by a factor of similar to 3 is obtained resulting in a value lower than 3 times the bulk copper value (1.68 mu Omega.cm). Real time resistance measurements indicate that an efficient thermal annealing can be achieved at 200 degrees C-300 degrees C within a couple of minutes. The morphological changes associated with such thermal treatment were analyzed using HR-SEM and XRD and highlight the role of stress relief, grain growth and formation of new grains primarily at the inter-droplet interfaces.
引用
收藏
页数:8
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