Enhanced sputtering and incorporation of Mn in implanted GaAs and ZnO nanowires

被引：20

作者：

Johannes, A. ^{[1
]}

Noack, S. ^{[1
]}

Paschoal, W., Jr. ^{[2
,3
]}

Kumar, S. ^{[2
,3
]}

Jacobsson, D. ^{[2
]}

Pettersson, H. ^{[2
,3
]}

Samuelson, L. ^{[2
]}

Dick, K. A. ^{[4
]}

Martinez-Criado, G. ^{[5
]}

Burghammer, M. ^{[5
]}

Ronning, C. ^{[1
]}

机构：

[1] Univ Jena, Inst Solid State Phys, D-07743 Jena, Germany

[2] Lund Univ, Solid State Phys Nanometer Struct Consortium, SE-22100 Lund, Sweden

[3] Halmstad Univ, Dept Math Phys & Elect Engn, SE-30118 Halmstad, Sweden

[4] Lund Univ, Ctr Anal & Synth, S-22100 Lund, Sweden

[5] European Synchrotron Radiat Facil, F-38043 Grenoble, France

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2014年 / 47卷 / 39期

基金：

瑞典研究理事会;

关键词：

ion beam; sputter yield; nanowires; x-ray fluorescence; GaAs; ZnO; monte carlo simulation; ION-IMPLANTATION; SIMULATION; NANOSTRUCTURES; CODE;

D O I：

10.1088/0022-3727/47/39/394003

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We simulated and experimentally investigated the sputter yield of ZnO and GaAs nanowires, which were implanted with energetic Mn ions at room temperature. The resulting thinning of the nanowires and the dopant concentration with increasing Mn ion fluency were measured by accurate scanning electron microscopy (SEM) and nano-x-Ray Fluorescence (nanoXRF) quantification, respectively. We observed a clearly enhanced sputter yield for the irradiated nanowires compared to bulk, which is also corroborated by iradina simulations. These show a maximum if the ion range matches the nanowire diameter. As a consequence of the erosion thinning of the nanowire, the incorporation of the Mn dopants is also enhanced and increases non-linearly with increasing ion fluency.

引用

页数：6

共 17 条

[1] Catalyst-nanostructure interaction in the growth of 1-D ZnO nanostructures [J].

Borchers, C ;

Müller, S ;

Stichtenoth, D ;

Schwen, D ;

Ronning, C .

JOURNAL OF PHYSICAL CHEMISTRY B, 2006, 110 (04) :1656-1660

[2] Precursor evaluation for in situ InP nanowire doping [J].

Borgstrom, M. T. ;

Norberg, E. ;

Wickert, P. ;

Nilsson, H. A. ;

Tragardh, J. ;

Dick, K. A. ;

Statkute, G. ;

Ramvall, P. ;

Deppert, K. ;

Samuelson, L. .

NANOTECHNOLOGY, 2008, 19 (44)

[3] Ion beam irradiation of nanostructures - A 3D Monte Carlo simulation code [J].

Borschel, C. ;

Ronning, C. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2011, 269 (19) :2133-2138

[4] A New Route toward Semiconductor Nanospintronics: Highly Mn-Doped GaAs Nanowires Realized by Ion-Implantation under Dynamic Annealing Conditions [J].

Borschel, Christian ;

Messing, Maria E. ;

Borgstrom, Magnus T. ;

Paschoal, Waldomiro, Jr. ;

Wallentin, Jesper ;

Kumar, Sandeep ;

Mergenthaler, Kilian ;

Deppert, Knut ;

Canali, Carlo M. ;

Pettersson, Hakan ;

Samuelson, Lars ;

Ronning, Carsten .

NANO LETTERS, 2011, 11 (09) :3935-3940

[5] Permanent bending and alignment of ZnO nanowires [J].

Borschel, Christian ;

Spindler, Susann ;

Lerose, Damiana ;

Bochmann, Arne ;

Christiansen, Silke H. ;

Nietzsche, Sandor ;

Oertel, Michael ;

Ronning, Carsten .

NANOTECHNOLOGY, 2011, 22 (18)

[6] Identification of an Intrinsic Source of Doping Inhomogeneity in Vapor-Liquid-Solid-Grown Nanowires [J].

Connell, Justin G. ;

Yoon, KunHo ;

Perea, Daniel E. ;

Schwalbach, Edwin J. ;

Voorhees, Peter W. ;

Lauhon, Lincoln J. .

NANO LETTERS, 2013, 13 (01) :199-206

[7] Magnetic Polarons and Large Negative Magnetoresistance in GaAs Nanowires Implanted with Mn Ions [J].

Kumar, Sandeep ;

Paschoal, Waldomiro, Jr. ;

Johannes, Andreas ;

Jacobsson, Daniel ;

Borschel, Christian ;

Pertsova, Anna ;

Wang, Chih-Han ;

Wu, Maw-Kuen ;

Canali, Carlo M. ;

Ronning, Carsten ;

Samuelson, Lars ;

Pettersson, Hakan .

NANO LETTERS, 2013, 13 (11) :5079-5084

[8] TRI3DYN-Collisional computer simulation of the dynamic evolution of 3-dimensional nanostructures under ion irradiation [J].

Moeller, Wolfhard .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2014, 322 :23-33

[9] TRIDYN - A TRIM SIMULATION CODE INCLUDING DYNAMIC COMPOSITION CHANGES [J].

MOLLER, W ;

ECKSTEIN, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :814-818

[10] Effect of diborane on the microstructure of boron-doped silicon nanowires [J].

Pan, L ;

Lew, KK ;

Redwing, JM ;

Dickey, EC .

JOURNAL OF CRYSTAL GROWTH, 2005, 277 (1-4) :428-436

← 1 2 →