Chemical-solution deposition of oriented (Ba0.33Sr0.67)TiO3 thin films

A metal acetate/alkoxide-chelate method is reported for the chemical-solution deposition of oriented ABO(3) perovskites at reduced temperatures through the use of fluorinated solvents. Thin films in the BaTiO3-SrTiO3 (BST) system were fabricated on i.) <100> LaAlO3 single crystal substrates and ii.) <100>-textured polycrystalline Ni substrates. As expected, a high-degree of preferred orientation was achieved on single-crystal LaAlO3. In addition, Lotgering factors of similar to0.99, indicating nearly complete a-axis (pseudo-cubic) texture of the films, were obtained for films deposited on the textured Ni. The results on LaAlO3 served as a benchmark for texture development; those on polycrystalline Ni were suitable for applications such as buffer layers for high-temperature superconductors and dielectrics in base-metal electroded capacitors.