Toward a nonlinearity model for a heterodyne interferometer: not based on double-frequency mixing

被引：27

作者：

Hu, Pengcheng ^{[1
]}

Bai, Yang ^{[1
]}

Zhao, Jinlong ^{[1
]}

Wu, Guolong ^{[1
]}

Tan, Jiubin ^{[1
]}

机构：

[1] Harbin Inst Technol, Inst Ultra Precis Optoelect Instrument Engn, Harbin 150080, Peoples R China

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 20期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

PERIODIC NONLINEARITY; DISPLACEMENT INTERFEROMETER; LASER INTERFEROMETER;

D O I：

10.1364/OE.23.025935

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Residual periodic errors detected in picometer-level heterodyne interferometers cannot be explained by the model based on double-frequency mixing. A new model is established and proposed in this paper for analysis of these errors. The multi-order Doppler frequency shift ghost beams from measurement beam itself are involved in final interference leading to multi-order periodic errors, whether or not frequency-mixing originating from the two incident beams occurs. For model validation, a novel setup free from double-frequency mixing is constructed. The analyzed measurement signal shows that phase mixing of measurement beam itself can lead to multi-order periodic errors ranging from tens of picometers to one nanometer. (C)2015 Optical Society of America

引用

页码：25935 / 25941

页数：7

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