High-resolution magnetic Co supertips grown by a focused electron beam

We present a technique for local growth of high-resolution, high-aspect-ratio magnetic tips and thin adherent magnetic cap coatings on top of batch fabricated scanning force microscopy silicon tips. A focused electron beam of a scanning electron microscope is used for decomposition of a directed cobalt carbonyl vapor flux. Exposure parameters determine the tip geometry and tip length. Deposits consist of cubic Co clusters of 2-5 nm in size dispersed in a stabilizing carbonaceous matrix. Magnetic force microscope sensors having magnetic tip apex diameters between 50 and 240 nm were produced. Tracks of magnetic transitions written in recording media of hard disks were used to characterize tip performance. (C) 2002 American Institute of Physics.