[1] Taiyuan Univ Technol, Coll Informat Engn, MicroNano Syst Res Ctr,Minist Educ, Key Lab Adv Transducers & Intelligent Control Sys, Taiyuan 030024, Peoples R China
[2] North Univ China, Sch Mat Sci & Engn, Taiyuan 030051, Peoples R China
[3] North Univ China, Shanxi Prov Key Lab Funct Nanocomposites, Taiyuan 030051, Peoples R China